A REVIEW PAPER ON FABRICATION TECHNOLOGIES

Abstract

MEMS (Micro-electro-mechanical-Systems) technology has been used in many application areas such as optics, communication, sensors fluids and biology. Optical devices include scanners; projection displays, micro mirrors, optical switch, tunable filters, micro lens, photodiodes and other optoelectronic devices. In the field of RF and wireless communications, MEMS technology has been used to make variable capacitors, inductors, transmitters and receivers. The micro-opto-electro-mechanical systems (MOEMS) are a sub division of the MEMS which involves the application of microsystems commonly in optical functions. Sensors are class of MEMS designed to sense, change and interact to environment. MoEMS include optical devices for telecommunication, sensing and mobile systems such as scanners, switches and micro-mirrors.  MEMS technology uses the techniques of micro fabrication to build miniature system with both electrical and nonelectrical system. They standard micromachining techniques in their fabrication and may operate exploiting mechanical, thermal, electromagnetic and optical principles. In this review paper they will discuss about fabrication technologies and different actuation principles related to MEMS/MoEMS devices.